SSIM Resources/Facilities
The Smart Sensors and Integrated Microsystems (SSIM) laboratories are located in the College of Engineering at Wayne State University and occupy more than 12,000
square feet of core facilities and laboratories, including a major new micro electro mechanical systems (MEMS) and microelectronics clean room developed jointly with
Delphi Corp. The program has more than 20 full-time staff scientists, engineers and research technicians available to assist in the operation and maintenance of the equipment. The SSIM Program is a central facility in the area of research and development for MEMS, microsystems, microsensors and nano/micro integration technology.
SSIM Advanced Microsystems Clean Room Fabrication Laboratory
This lab is approximately 5,000 square feet of class 10/100 clean room with full microlithography, characterization and packaging for advanced MEMS, microelectronics
and microsystems fabrication. This lab has over $7.1 million of state-of-the-art equipment donated by Delphi Corp. A comprehensive equipment list can be found at the
following web site: http://www.ssim.eng.wayne.edu/ssim/management/list.asp. The clean room facilities contain microelectronic fabrication facilities for up to 6-inch
wafers from basic processing to metrology and packaging. The clean room bays are outlined as follows:
• Wafer processing bay with an advanced 10-tube-processing furnace for oxide, nitride, oxynitride, PECVD and high-temperature processing of hundreds of wafers per batch with eight tubes for different processes
• Plasma etching facilities that include plasma enhanced chemical etching and deep trench etching facilities
• Wet etching and chemical processing bay for wet chemistry
• Class 10 photolithography bay with manual and automatic wafer coating, mask alignment and development
• Metallization bay with sputter deposition and electron beam evaporation deposition systems
• Silicon-plus bay with production plasma source molecular beam epitaxy (PSMBE) system for deposition of wide bandgap semiconductors on up to six inch diameter wafers
• Metrology and packaging bay for device measurement, wire bonding and device packaging facilities
SSIM Electronic Materials Integrated Technology (EMIT) Laboratory
This cutting edge laboratory focuses on the research and development of important electronic and photonic materials, and the processing and micromachining of micro- and nanostructures and devices.
Equipment
• Lambda Physik LPX 200 and 300 Excimer Lasers integrated with two pulse-laser deposition UHV systems and an ultra-high precision micromachining setup
• Pulse-laser deposition chamber for oxide film growth
• Pulse-laser deposition chamber for pure metal and nitride growth
• Excimer laser micromachining optical bench, which includes precise-beam homogenization and attenuation. The sample step and repeat stage has optically encoded 25-nanometer XYZ beta and rocking resolution. The Excimer laser micromachining system is housed in a class-10 clean room
• Ultra-high-vacuum balanced magnetron-sputtering system with microwave radical injector system for development of metal oxide films at low temperatures
• Ultra-high-vacuum multitarget sputtering system with rotating sample palette for precision thin-film multilayer deposition
• Ultra-high-vacuum plasma source molecular beam epitaxy (PSMBE) for nitride growth
SSIM Electronic/Photonic Characterization Laboratory
The characterization laboratory houses test and measurement equipment for analysis of materials and devices. The lab contains specialized testing stations for the electronic, photonic and acoustic characterization of sensors and integrated microsystems. The lab also includes biological testing facilities for biological and chemical sensors and microsystems.
Computer Assisted Robot Enhanced Systems (CARES) Equipment
• Raman spectrometer
• Voice-controlled Aesop robot arm
• B-Scan ultrasound system
• RT-100 robot
• Robix robot
• 3D- Autosteroscopic lenticular display
• Hires stereoscopic heads-up display
• Cyber touch hand
• Two hi-resolution video cameras and adapters
Photonic Characterization Equipment
• Perkin-Elmer Lambda 900 UV/VIS/NIR spectrometer for variable angle optical transmission and reflection measurements and integrated temperature dependent photoconductivity measurement features
• Digikrom 240, Digikrom 340 spectrometers system with purged nitrogen compartment and integrated temperature dependent photoluminescence, photoconductivity measurement features in the 200-800 nm wave range and 4.5-730K temperature range
• A variable angle single wavelength ellipsometry system
Electrical Characterization Equipment
• Custom built Hall effect system with 70K – 800K sample heating
• Signatone S-250 submicron analytical probe station with dark box, Signatone S-300 and Signatone S-1041 Hot Chuck System for electrical characterization.
This system includes:
- HP 8753D network analyzer
- HP 4291ALF impedance analyzer
- Keithley 237 high voltage source
- Keithley 228A high current source
- Keithley 6517A electrometer/high resistance meter
- HP 54825A four-channel digitizing oscilloscope
- HP 4140B pA meter/DC voltage source
• Four probe resistivity test system
• Hydrogen sensor test system
• CO sensor test system
• Ultrasound sensor test system, with PA (Precision Acoustics) 1mm calibrated needle hydrophone
• Ultrasound imaging system with Imperium AcoustoCam I-110 ultrasound camera
• Perkin Elmer glower, which can be used as the infrared source for infrared detector test
• Raytheon 2000B infrared camera
• Gamry PCI4/300 potentiostat and bioanalytical C3 cell stand for electroanalytical experiments
SSIM Basic Materials Analysis Laboratory
Surface Topology and Chemical/Elemental Surface Analysis Equipment
• Perkin-Elmer 5500 X-ray photoelectron spectrometer for surface chemical/elemental analysis, with an Ar ion sputtering gun for depth profiling
• Perkin-Elmer 660 Auger spectrometer, with a scanning electron microprobe for imaging and elemental mapping
• AFM/STM
SSIM Computer Simulation Laboratory
Materials, photonics, device and VLSI simulation modeling for the development of emerging smart sensors and integrated microsystem devices are performed in this area of the EMIT laboratory. The lab contains 10 linked smart terminals and runs 3 platforms – HP, Sun, and Silicon Graphics – for running the following software packages:
• Mathematical
• Mathematica Optica
• Zemax Thin Film Optical Materials Simulation Program
• Cerius 3.2 Materials Modeling software
• Mentor Graphics software for VLSI design and simulation
• Galatica Spectroscopic Analysis software
SSIM Biomicrosystems Laboratory
The SSIM Biomicrosystems laboratory is dedicated to the translational development of biological and chemical sensors and integrated microsystem device structures.
The lab contains a class 100 clean room for biomicrosystem processing and a class 100,000 clean room for general substrate preparation.
Class 100 Clean Room
• Semicon photoresist spin deposition and spin developer bench for both positive and negative photoresist
• Semicon filtered etch chemical etching bench
• KSV 5000 Langmere Bludgett organic deposition system for deposition of organic and biological thin films
• Biological station for the growth and immobilization of neurons on devices
• Biological station for pathogenic bacteria investigation
• Gamma Imaging system for radioisotope tagging of ligands and organics
• Automated photolithography deposition and development station
• Deep UV microlithography station for biodevice development
• Class 10 clean bench with stereo microscope for microsurgery and cell/tissue research
Class 100,000 Clean Room
• Sensor characterization station
• Renishaw inVia Raman Microscope
• Photonics and microfluidic characterization station
• RF implant characterization station for bioimplant characterization
• Inverted biological microscope for bright field, fluorescence, and calcium imaging
• Agilent 8648B signal generator
• Agilent 53132A universal counter
• Agilent 8753D 30XHz - 6 GHz network analyzer
• Agilent Infinium 2 GSa/S oscilloscope
• HP 8508A vector volmeter
• Advanced real-time microscopic visualization system with built in incubator and environmental chamber for observation of live cell growth
• Waveguide Characterization Station - Acoustically isolated stating with micro pump systems for controlled fluid injection into microfluidic devices. Also contains waveguide alignment system with fiber or waveguide light sources, that include a UV capable pulsed Q switched Nd: YAG laser, micromanipulators and microscope
SSIM Magnetic Characterization Laboratory
This magnetic characterization laboratory is located in the Department of Physics & Astronomy.
• Two Quantum Design model MPMS-5S SQUID magnetometers (ultra low-field option installed in one magnetometer and high-temperature oven insert is available)
• Lake Shore model 7000 ac susceptometer
• Homebuilt ac susceptometers (4-300 K, variable frequencies, 0.010 – 16 Oe rms)
• EG&G model 155 vibrating sample magnetometer with LHe cryostat and 1.2-T electromagnet
• Two LHe cryostats for magnetoresistance and I-V characteristics measurements (Keithley model K220 and K224 programmable current sources, two Keithley model 182 nano voltometers, several Keithley model 197 multimeters, Keithley model 617 electrometer, EG&G model 5204 lock-in detector and input transformer)
• 9-Tesla superconducting magnet/cryostat (Janis)
• 7-Tesla superconducting magnet/cryostat (Cryomagnetics)
• Homebuilt B-vs-H hysteresis, toroidal sample tester. Homebuilt FMR spectrometer system (9 GHz)
• Spex Triax 550 series Raman/photoluminescence spectrometer
• 4He calorimeter w/ 4-Tesla superconducting magnet (1.2 – 100 K, adiabatic and relaxation techniques)
• 3He cryostat for calorimetric, susceptometry, and magnetization measurements with SQUID probe
• Digital III multi-mode AFM/MFM (in Professor Mao’s group in Chemical Engineering)
• One ultrahigh vacuum custom-built MBE system for magnetic film growth with RHEED
• One three-source, rotational substrate rf sputtering system
• One four-hearth e-beam deposition system
• Single-source dc sputtering system
Additional University Resources
• Hitachi model S-2400 scanning electron microscope with EDS for composition analysis
• JEOL 2010 Transmission Electron Microscope, operated at 200 kV
• X-ray diffraction
• Dynamic light scattering instrument for particle size determination
High Temperature Materials Laboratory
• This laboratory has an induction heating system (Ameritherm), induction-radiant system with SiC susceptors, radiant heating furnaces (one CM Thermal Cycling Furnace with 1600C capability and two Carbolite Furnaces with 1500C capability)
• There are three modern MTS servohydraulic 810 material testing systems with 2, 22, and 55 kip loading capabilities. These machines are run by modern Testar software system. There are both contact and non-contact (OPTRON) extensometers for strain measurements at high temperature. There are conditioning chambers (moisture and temperature) for controlling test environment
• An Echo-Therm Thermal Wave Imaging System and a Digital Speckle System is also available
• Excellent computational facilities are available. Three Sun stations dedicated for finite element calculations are available to SSIM researchers. ABAQUS, NASTRAN, HYPERMESH, IDEAS And LS-DYNA3D codes are available. College of Engineering Computer Center offers great capability for solid mechanics related computational programs and UNIX hardware systems. A WSU Cray –YMP is also available for research
Surface Science Characterization Laboratory
The Chemical Engineering Department has over 1000 square feet of laboratory space dedicated to materials characterization research in the College of Engineering and is utilized by researchers in the SSIM program.
Materials characterization equipment available include:
• Integrated UHV analysis system (equipped with STM and AFM, AES/LEED, a quadrupole mass spectrometer, temperature program desorption, ion sputtering, vapor-deposition, and a low pressure reactor)
• High pressure reactor system coupled with a gas chromatograph
• FTIR equipped with diffuse reflectance accessories for control atmosphere studies
• X-ray diffractometer
• Thermal gravimetric analyzer coupled with a quadrupole mass spectrometer, a differential scanning calorimeter, and a thermomechanical analyzer.
One of the Raman systems and the x-ray diffractometer is located in WSU's Central Instrumentation Facilities, while the micro-Raman spectrometer is located in the Wayne State Institute for Manufacturing Research's materials research facilities. All other equipment comprises dedicated systems located in the SSIM and Chemical Engineering laboratories.
The UHV-compatible STM, AFM, and LEED/Auger are from Omicron Associates. The STM and AFM have additional vibration isolation of the microscope stage via a four-spring suspension system with magnetic damping. These microscopes are designed with a two-dimensional (X and Z) sample approach stage, which utilizes inertia drive shear piezos, thus eliminating the need for any external mechanical links to the microscope. This ensures that the microscope is fully decoupled during sample approach and imaging. The whole UHV-STM system is very stable and a vertical resolution of 0.1 Å and a lateral resolution of 1 Å can be achieved quite easily. The control unit is interfaced with an HP-9000 workstation for data acquisition.
Spectral resolution can be as high as 0.25 cm-1. The x-ray diffractometer is a Rigaku 12 kW rotating anode system, equipped with a PSD from Innovative Technology. The thermal gravimetric analyzer, differential scanning calorimeter, and thermomechanical analyzer are Perkin Elmer 7-series, equipped with a PE-7700 data station capable of multitasking. The FTIR spectrometer is a Nicolet 20 DXC with a MCT detector, and the gas chromatograph is an HP 5890A dual-column gas chromatography equipped with flame ionization and thermal conductivity detectors.
Neurological Research and Animal Studies Laboratories
The Neurosurgery Department at Wayne State University has approximately 2000 square feet of laboratory space that is available for the SSIM program. Included are a 400 square foot histology lab, a 400 square foot cell/molecular lab, a 500 square foot small animal surgical suite, and two 200 square foot small animal behavioraltesting labs. All labs are adjacent or near each other in the basement of the Lande Medical Research Building.
Three AAALAC-accredited facilities are available for small and large animal housing in the Lande building, Scott Hall, and the Elliman building. The Elliman building also contains state-of-the-art surgical facilities under the direction of a full-time veterinarian and two licensed surgical technologists. An office and research facilities in the Neurosurgery Department include 2 Dell Pentium IV PCs, one of which is dedicated to the fluorescence microscopy morphometry system.
In addition to routine histological and immunocytochemical equipment, the following specialized systems are available:
• 3 Leica/Leitz light microscopes
• Leitz Macroscope
• Automated photography system
• Stereology program for light microscopy
• -80° freezer
• Paraffin embedding apparatus
• Rotary microtome for paraffin sections
• Incubator
• Laminar flow hood
• 3 –20oC freezers
• 3 refrigerators
• Liquid scintillation counter
• Morris water maze
• Roto-rod motor testing system
• Custom-made behavioral apparatus for motor learning testing
Access to a Phillips 300 electron microscope maintained by the Department of Emergency Medicine.
A state-of-the-art morphometry system coupled to a new Leica DMX epifluorescence upright microscope is also available. The morphometry system is the most recent version developed by Microbrightfield, Inc. and includes the following components:
• NeurolucidaTM
• 3D neuron reconstruction and analysis
• 3D anatomical brain mapping
• 3D visualization
• Automatic measurement of many parameters
• Serial section reconstruction
• Morphometry
• Interactive image analysis
• Stereo Investigator
Optical fractionator provides efficient, precise, unbiased and reliable estimates of the number andmorphometric properties of biological structures
Allows the operator to work directly with the light microscope, and with digital or hard-copy images from confocal microscopes, electron microscopes, and scanning topographic instruments
Creates comprehensive maps of cells and anatomical regions
Uses either the LucividTM for direct visualization and quantification through the microscopy or a video camera with frame grabber
Children’s Hospital of Michigan (CHM) Research Facilities
The Children’s Hospital of Michigan is a 225 bed full service children’s hospital in Detroit, Michigan. There is an active Hematology/Oncology service, which is a member of the Children’s Oncology group. There is a regular Tumor Conference. There are five geographic full time pediatric surgeons, as well as geographic full time surgical specialist in all areas. There are 12 Operating Rooms for a facility that does approximately 12,000 cases a year. OR12 in the hospital’s OR suite is a state of the art dedicated robotic surgery suite with full two way teleconferencing and Socrates telementoring capability. There is also a Pathology Department consisting of two full time pediatric pathologist on site who also administers a Pediatric Pathology Fellowship. In addition, there are two other pediatric pathologists in the Medical Center who limit themselves to Neural Pathology or Fetal Pathology. The two geographic full time pediatric Pathologists have committed to this, as has the Chairman of the Department of Pathology at Wayne State University. The Pathology Department is directly adjacent to the operating rooms. The Raman microscope/spectrometer is housed there and maintained by the Department of Pathology. In this manner all specimens would be available for Raman microscopy.
The Frankel Pediatric Advanced Technology Institute is a part of the Children’s Research Center of Michigan, a cooperative effort of the Department of Pediatrics at Wayne State University and the Children’s Hospital of Michigan. This work is supported by a dedicated, large operating room facility at the Elliman Building with full animal husbandry and veterinary support. There is 400 square feet of operating room space dedicated to robotic surgery with a complete Zeus surgical robotic system and all equipment necessary for minimally invasive surgery. This OR includes full videoconferencing capabilities including Socrates telementoring. In addition, there are 1500 square feet of swine holding areas, pathology laboratory, pre and post op holding rooms, and other space and equipment necessary for survival animal studies. This room is dedicated entirely to the work of the Frankel Pediatric Advanced Technology Institute. There is other space available, as needed, including imaging facilities.
