Wayne State University

Service and price

  • Fab user fees are based on a hourly rate. An annual entrance fee ($250) is charged for gowning
  • If staff time is requested, additional $45/hour will be added to the user fee.

nFab Rates

 

 

Yearly Gowning Fee

$250.00  / Year / individual

 

Services  per hour

University Grant Funded

Corporate Rate

     
E-Beam Evaporating  $20.00 $40.00
Sputtering $22.00 $44.00
PECVD $26.00 $53.00
Deep  RIE  $33.00 $66.00
Drytec RIE $10.00 $20.00
Lam Etch $10.00 $20.00
XeFl2 Etch $10.00 $20.00
Wafer Dicing $82.00 $119.00
Diffusion Furnace Oxide $21.00 $42.00
Diffusion Furnace Poly Si $43.00 $86.00
Diffusion Furnace LTO $43.00 $86.00
Diffussion Furnace Boron Doping $21.00 $42.00
Diffusion Furnace Phosphorouse Doping $21.00 $42.00
Diffusion Furnace Anneal $21.00 $42.00
Wet Bench Processes $15.00 $30.00
Mask Alignment - EVG 620 $21.00 $42.00
SEM/EDS $35.00 $105.00
FIB $51.00 $161.00