Wayne State University


The Nano Fabrication (nFab) core shared facility, a 5000 sq ft class-100 cleanroom, is equipped with versatile processing equipment assembled for the purpose of supporting research in the fields of nanotechnology, micro electromechanical system (MEMS), bioengineering, microelectronics, electronic materials, and photonic devices.

The missions of the core facility are:

• To provide shared experimental capabilities with advanced equipment for nanofabrication and material characterization.

• To promote and enable high quality research using nanotechnology.

• To provide effective training and support for graduate and undergraduate students in nano research and applications.

• To facilitate the use of nano-fabrication techniques in collaborative interdisciplinary research and in non-traditional areas.

nFab is managed by the Office of the Vice President for Research (OVPR) with the mission of serving the community. Currently, there are two full-time staff to assist nanofabrication processes, train students and maintain equipment. A steering committee comprising of faculty members and users oversees the nFab operation.

Operation Hours: Monday-Friday 8am-6pm

New to nanofabrication?  Let us help you make your device! Sample projects include biomedical and environmental sensors, microfluidic devices, and implantable devices. Please contact the nFab director, Prof Mark Cheng (mcheng@eng.wayne.edu) for more information.